US 11,990,885 B2
Method for manufacturing acoustic devices with improved performance
Buu Quoc Diep, Murphy, TX (US); Derya Deniz, McKinney, TX (US); Matthew L. Wasilik, Plano, TX (US); and John Belsick, Bend, OR (US)
Assigned to Qorvo US, Inc., Greensboro, NC (US)
Filed by Qorvo US, Inc., Greensboro, NC (US)
Filed on Jun. 29, 2021, as Appl. No. 17/361,698.
Prior Publication US 2022/0416744 A1, Dec. 29, 2022
Int. Cl. H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01)
CPC H03H 3/02 (2013.01) [H03H 9/02015 (2013.01); H03H 9/0211 (2013.01); H03H 9/02157 (2013.01); H03H 9/131 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for manufacturing an acoustic device comprising:
providing a substrate;
providing a bottom electrode over the substrate;
providing a sacrificial layer on the bottom electrode;
patterning the bottom electrode and the sacrificial layer;
polishing the sacrificial layer such that a portion of the sacrificial layer remains on the bottom electrode; and
removing the remaining portion of the sacrificial layer via a cleaning process such that a surface roughness of the bottom electrode is maintained.