US 11,990,851 B2
Manufacturing of a flexible piezoelectric film-based power source
Birol Ozturk, Parkville, MD (US); and Peker Milas, Baltimore, MD (US)
Assigned to Morgan State University, Baltimore, MD (US)
Filed by Morgan State University, Baltimore, MD (US)
Filed on Mar. 29, 2021, as Appl. No. 17/216,375.
Claims priority of provisional application 63/000,588, filed on Mar. 27, 2020.
Prior Publication US 2021/0305915 A1, Sep. 30, 2021
Int. Cl. H10N 30/077 (2023.01); H02N 2/00 (2006.01); H02N 2/18 (2006.01); H10N 30/057 (2023.01); H10N 30/098 (2023.01); H10N 30/30 (2023.01); H10N 30/50 (2023.01); H10N 30/857 (2023.01); H10N 30/87 (2023.01)
CPC H02N 2/22 (2013.01) [H02N 2/18 (2013.01); H10N 30/057 (2023.02); H10N 30/077 (2023.02); H10N 30/098 (2023.02); H10N 30/30 (2023.02); H10N 30/50 (2023.02); H10N 30/857 (2023.02); H10N 30/877 (2023.02); H10N 30/878 (2023.02); Y10T 29/42 (2015.01)] 23 Claims
OG exemplary drawing
 
1. A method for manufacturing a piezoelectric element for generating electricity upon flexing of the element, comprising:
a. spin-coating a first substrate layer onto a support substrate;
b. depositing a first electrode film onto the first substrate layer;
c. spin coating polyvinylidene fluoride (PVDF) containing solution on the first electrode film to result in a PVDF film;
d. annealing the PVDF film;
e. depositing a second electrode film onto the PVDF film;
f. spin-coating a second substrate layer on top of the second electrode film;
g. forming a hole through the first and second substrate layers;
h. filling the hole with silver paste to contact to the first and second electrode layers;
i. peeling the support substrate from the first substrate layer resulting in a multilayer device;
j. placing a drop of silver paste in the hole formed in the first substrate layer.