CPC H02J 50/12 (2016.02) [H01F 38/14 (2013.01); H02J 50/90 (2016.02)] | 20 Claims |
1. A non-thermal plasma generator comprising:
an output stage circuit, connected to receive an alternating current power signal at an operating frequency depending by feedback upon a resonant frequency of the output stage circuit;
a plasma probe having a distal end comprising a non-thermal plasma generating site, and a proximal end coupled to the output stage circuit, the distal and proximal ends being interconnected by a transmission line having an intrinsic capacitance which is part of a capacitance determining the resonating frequency;
a metering circuit, coupled to the output stage circuit to measure the operating frequency thereof while the probe is coupled to the output stage circuit; and
a control circuit, to which the metering circuit provides frequency measurements, and which trims the measured operating frequency to within a targeted range of frequencies by selection of a compensation capacitance positioned in electrical parallel with the intrinsic capacitance of the transmission line.
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13. A method of plasma generation, the method comprising:
providing a non-thermal plasma generator comprising a driver circuit configured to operate within a range of operating frequencies, when connected to a plasma probe having a capacitance within a range of capacitances compatible with the plasma probe resonating within the range of operating frequencies;
coupling a plasma probe to a secondary coil of an output stage of the non-thermal plasma generator, the plasma probe having a probe capacitance not within the range of compatible capacitances;
measuring a first operating frequency of the non-thermal plasma generator while the plasma probe is coupled to the secondary coil;
selecting automatically a compensating capacitance, according a difference between the first operating frequency and the range of operating frequencies, and coupling it to the output stage such that the probe capacitance and the compensating capacitance together provide a capacitance within the range of capacitances compatible with the plasma probe resonating within the range of operating frequencies; and
operating the non-thermal plasma generator at a second operating frequency within the range of operating frequencies.
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