CPC H01L 31/02167 (2013.01) [H01L 31/02168 (2013.01); H01L 31/022441 (2013.01); H01L 31/02363 (2013.01); H01L 31/0682 (2013.01); H01L 31/1868 (2013.01)] | 9 Claims |
1. A solar cell, comprising:
a substrate;
a first passivation film, an anti-reflection layer and at least one first electrode sequentially formed on a front surface of the substrate; and
a tunneling layer, a field passivation layer and at least one second electrode sequentially formed on a rear surface of the substrate; wherein:
the field passivation layer includes a first field passivation sub-layer corresponding to a portion of the field passivation layer in a first region between the at least one second electrode and the substrate, and a second field passivation sub-layer corresponding to a portion of the field passivation layer in a second region between adjacent second electrodes;
a conductivity of the first field passivation sub-layer is greater than a conductivity of the second field passivation sub-layer, and a thickness of the second field passivation sub-layer is smaller than a thickness of the first field passivation sub-layer;
a surface doping concentration of a top surface of the second field passivation sub-layer facing away from the substrate is lower than a surface doping concentration of a top surface of the first field passivation sub-layer facing away from the substrate;
each of the first field passivation sub-layer and the second field passivation sub-layer includes an ion diffusion layer, the first field passivation sub-layer further includes an ion enrichment layer disposed on a surface of the ion diffusion layer of the first field passivation sub-layer facing away from the substrate, both the ion diffusion layer and the ion enrichment layer of the first field passivation sub-layer are doped with ions, and a doping concentration of the ion enrichment layer is greater than a doping concentration of the ion diffusion layer of the first field passivation sub-layer; and
the top surface of the second field passivation sub-layer is closer to the substrate than the top surface of the first field passivation sub-layer, and a thickness of the ion diffusion layer of the first field passivation sub-layer is greater than a thickness of the ion diffusion layer of the second field passivation sub-layer in the direction away from the substrate toward the field passivation layer.
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