US 11,990,492 B2
Solid-state imaging sensor
Itaru Oshiyama, Kanagawa (JP); and Hiroshi Tanaka, Kanagawa (JP)
Assigned to Sony Group Corporation, Tokyo (JP)
Filed by SONY GROUP CORPORATION, Tokyo (JP)
Filed on Dec. 22, 2022, as Appl. No. 18/086,774.
Application 18/086,774 is a continuation of application No. 17/387,127, filed on Jul. 28, 2021, granted, now 11,557,621.
Application 17/387,127 is a continuation of application No. 16/295,776, filed on Mar. 7, 2019, granted, now 11,121,161, issued on Sep. 14, 2021.
Application 16/295,776 is a continuation of application No. 15/574,558, granted, now 10,263,025, issued on Apr. 16, 2019, previously published as PCT/JP2016/065024, filed on May 20, 2016.
Claims priority of application No. 2015-114525 (JP), filed on Jun. 5, 2015.
Prior Publication US 2023/0126141 A1, Apr. 27, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 27/146 (2006.01); G02B 1/115 (2015.01); G02B 1/118 (2015.01); H01L 27/14 (2006.01); H04N 25/60 (2023.01); H04N 25/70 (2023.01)
CPC H01L 27/14625 (2013.01) [G02B 1/115 (2013.01); G02B 1/118 (2013.01); H01L 27/14 (2013.01); H01L 27/146 (2013.01); H01L 27/14621 (2013.01); H01L 27/14623 (2013.01); H01L 27/14627 (2013.01); H01L 27/14645 (2013.01); H01L 27/14685 (2013.01); H04N 25/60 (2023.01); H04N 25/70 (2023.01)] 7 Claims
OG exemplary drawing
 
1. A solid-state imaging sensor, comprising:
a plurality of pixel units;
a substrate including a plurality of photoelectric conversion units;
a first layer including a plurality of concave portions, the first layer disposed over the photoelectric conversion units in a cross sectional view;
a second layer disposed on the first layer;
a third layer disposed on the second layer;
wherein each of the unit pixels includes at least one photoelectric conversion unit and at least first and second concave portions for the at least one photoelectric conversion unit,
wherein the second concave portion is adjacent to the first concave portion in a width direction of the concave portions, and
wherein an interface between the first layer and the second layer includes a flat portion disposed between the first concave portion and the second concave portion.