US 11,990,490 B2
Photoelectric conversion apparatus and equipment
Tsutomu Tange, Kanagawa (JP); Toshiyuki Ogawa, Chiba (JP); Hideaki Ishino, Tokyo (JP); and Yusuke Onuki, Kanagawa (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Apr. 5, 2021, as Appl. No. 17/222,743.
Claims priority of application No. 2020-069428 (JP), filed on Apr. 7, 2020.
Prior Publication US 2021/0313369 A1, Oct. 7, 2021
Int. Cl. H01L 27/146 (2006.01)
CPC H01L 27/14623 (2013.01) [H01L 27/14621 (2013.01); H01L 27/14627 (2013.01); H01L 27/14636 (2013.01); H01L 27/1464 (2013.01); H01L 27/14645 (2013.01)] 32 Claims
OG exemplary drawing
 
1. A photoelectric conversion apparatus comprising:
a photoelectric conversion layer;
a light-shielding film configured to cover the photoelectric conversion layer;
a light-receiving pixel area; and
a light-shielding pixel area,
wherein the light-shielding film includes a first metallic layer and a second metallic layer located between the first metallic layer and the photoelectric conversion layer,
wherein a principal component of the first metallic layer is aluminum or silver,
wherein a principal component of the second metallic layer is tungsten or tantalum,
wherein, in the light-shielding pixel area, the photoelectric conversion layer is shielded from light with the light-shielding film, and
wherein, in the light-receiving pixel area, the light-shielding film including the first metallic layer and the second metallic layer has a plurality of openings.
 
22. A photoelectric conversion apparatus comprising:
a photoelectric conversion layer; and
a light-shielding film configured to cover the photoelectric conversion layer,
wherein the light-shielding film includes a first metallic layer, a second metallic layer located between the first metallic layer and the photoelectric conversion layer, and
a third metallic layer located between the first metallic layer and the second metallic layer,
wherein a principal component of the first metallic layer is aluminum or silver,
wherein a principal component of the second metallic layer is tungsten or tantalum,
wherein a principal component of the third metallic layer is tantalum or titanium, and
wherein the principal component of the second metallic layer is different from the principal component of the third metallic layer.