US 11,990,485 B2
Photoelectric conversion device having a semiconductor substrate with first, second and third photoelectric conversion portions
Junya Tamaki, Tokyo (JP); Keita Torii, Kanagawa (JP); and Kazuya Igarashi, Tokyo (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Oct. 1, 2020, as Appl. No. 17/061,264.
Claims priority of application No. 2019-192197 (JP), filed on Oct. 21, 2019.
Prior Publication US 2021/0118924 A1, Apr. 22, 2021
Int. Cl. H01L 27/146 (2006.01)
CPC H01L 27/14603 (2013.01) [H01L 27/14638 (2013.01); H01L 27/14683 (2013.01)] 31 Claims
OG exemplary drawing
 
1. A photoelectric conversion device comprising:
a semiconductor substrate having a first face and a second face that is arranged on an opposite side of the first face and receives light, and including a first photoelectric conversion portion, a second photoelectric conversion portion, and a third photoelectric conversion portion, wherein the first photoelectric conversion portion, the second photoelectric conversion portion, and the third photoelectric conversion portion are arranged in this order in a horizontal direction of the substrate,
wherein the semiconductor substrate includes:
a first trench extending from the first face between the first photoelectric conversion portion and the second photoelectric conversion portion,
a first insulating layer arranged in the first trench,
a second trench extending from the second face between the second photoelectric portion and the third photoelectric portion, and
a second insulating layer arranged in the second trench,
wherein, along a direction from the first face to the second face, the first insulating layer and another part of the semiconductor substrate are arranged in this order, and a part of the semiconductor substrate and the second insulating layer arranged in this order,
wherein an end on a second face side of the first trench is located closer to the second face than an end on a first face side of the second trench, and
wherein the first trench has a first portion extending from the first face toward the second face, and a second portion extending from a bottom surface of the first portion toward the second face, and a maximum width of the second portion is smaller than a minimum width of the first portion in a cross section taken along a direction in which the first photoelectric conversion portion and the second photoelectric conversion portion are arranged.