US 11,990,428 B2
Bonding structures in semiconductor packaged device and method of forming same
Hao Chun Liu, Hsinchu (TW); Ching-Wen Hsiao, Hsinchu (TW); Kuo-Ching Hsu, Chung-Ho (TW); and Mirng-Ji Lii, Sinpu Township (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Jul. 18, 2022, as Appl. No. 17/813,069.
Application 17/813,069 is a division of application No. 16/265,136, filed on Feb. 1, 2019, granted, now 11,393,771.
Claims priority of provisional application 62/737,531, filed on Sep. 27, 2018.
Prior Publication US 2022/0352094 A1, Nov. 3, 2022
Int. Cl. H01L 21/56 (2006.01); H01L 21/78 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 23/58 (2006.01)
CPC H01L 23/562 (2013.01) [H01L 21/563 (2013.01); H01L 21/78 (2013.01); H01L 23/3185 (2013.01); H01L 23/585 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 24/16 (2013.01); H01L 24/81 (2013.01); H01L 2224/1146 (2013.01); H01L 2224/11849 (2013.01); H01L 2224/13026 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/81815 (2013.01); H01L 2924/35121 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
forming a plurality of unit regions in a wafer, each of the plurality of unit regions comprising a plurality of die regions;
forming a plurality of first seal rings in the wafer, each of the plurality of first seal rings surrounding a corresponding die region of the plurality of die regions, wherein the plurality of first seal rings do not overlap with each other in a plan view;
forming a plurality of second seal rings in the wafer, each of the plurality of second seal rings surrounding a corresponding unit region of the plurality of unit regions; and
forming a plurality of connectors over the wafer, each of the plurality of connectors having an elliptical shape in a plan view, a long axis in the plan view of each of the plurality of connectors being oriented toward a center point in the plan view of a corresponding unit region of the plurality of unit regions.