CPC H01L 21/76831 (2013.01) [H01L 21/76843 (2013.01); H01L 21/76879 (2013.01); H01L 21/76804 (2013.01)] | 20 Claims |
1. An apparatus comprising:
conductive elements underlying an insulative material;
conductive lines operably coupled to the conductive elements; and
contacts intersecting the conductive lines and extending from upper surfaces of the conductive lines to upper surfaces of the conductive elements with the contacts directly adjacent to the insulative material and the conductive elements, an outer diameter of the contacts at an elevation of the upper surfaces of the conductive lines is greater than a width of the conductive lines external to the contacts.
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