US 11,990,363 B2
Wafer support pin lifting device
Dezan Yang, Shenyang (CN); Hualong Yang, Shenyang (CN); and Fengli Wu, Shenyang (CN)
Assigned to PIOTECH INC., Shenyang (CN)
Filed by PIOTECH INC., Shenyang (CN)
Filed on Dec. 14, 2021, as Appl. No. 17/550,589.
Claims priority of application No. 202011633338.2 (CN), filed on Dec. 31, 2020.
Prior Publication US 2022/0208595 A1, Jun. 30, 2022
Int. Cl. H01L 21/687 (2006.01)
CPC H01L 21/68742 (2013.01) 14 Claims
OG exemplary drawing
 
1. A wafer support pin lifting device, suitable for a cavity, the device comprising:
a support plate, for supporting a plurality of support pins;
a slide block, slidably connected to an inner wall of a cavity so that the slide block slides relative to the cavity; and
a lifting pole, having a first end, a second end and a third end, wherein the first end is connected to the support plate, the second end is pivotally connected to the slide block, the third end is connected to an actuator, and the actuator is for controlling the lifting pole to ascend and descend between a high position and a low position;
wherein, with a pivotal connection between the second end of the lifting pole and the slide block, the lifting pole approaching the high position causes the support plate to be approximately horizontal, and the lifting pole approaching the low position causes the support plate to be tilted.