US 11,990,362 B2
Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body
Nobuhiro Hidaka, Tokyo (JP); Megumi Ootomo, Tokyo (JP); and Jun Arikawa, Tokyo (JP)
Assigned to SUMITOMO OSAKA CEMENT CO., LTD., Tokyo (JP)
Appl. No. 17/612,173
Filed by SUMITOMO OSAKA CEMENT CO., LTD., Tokyo (JP)
PCT Filed May 21, 2020, PCT No. PCT/JP2020/020174
§ 371(c)(1), (2) Date Nov. 17, 2021,
PCT Pub. No. WO2020/235651, PCT Pub. Date Nov. 26, 2020.
Claims priority of application No. 2019-096046 (JP), filed on May 22, 2019; and application No. 2019-096053 (JP), filed on May 22, 2019.
Prior Publication US 2022/0223455 A1, Jul. 14, 2022
Int. Cl. H01L 21/68 (2006.01); C04B 35/505 (2006.01); C04B 35/565 (2006.01); C04B 35/645 (2006.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/6833 (2013.01) [C04B 35/505 (2013.01); C04B 35/565 (2013.01); C04B 35/645 (2013.01); H01J 37/32724 (2013.01); H01L 21/68757 (2013.01); C04B 2235/549 (2013.01); H01J 2237/334 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A composite sintered body comprising:
a metal oxide as a main phase;
silicon carbide as a sub-phase; and
silicate of a metal element that is included in the metal oxide,
wherein an average aggregation diameter of the silicate in a field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.