CPC H01L 21/6833 (2013.01) [H10K 71/00 (2023.02); H10K 50/11 (2023.02); H10K 50/844 (2023.02); H10K 59/12 (2023.02); H10K 59/1201 (2023.02)] | 16 Claims |
1. A chuck for supporting a target substrate for a display device, the chuck comprising:
a base having a first surface to support an object solely by electrostatic force and a second surface opposite the first surface, the first surface including a first area and a second area; and
indentations formed in the second area and recessed from the first area in a thickness direction of the base, wherein the indentations include a first indentation extending in a first direction and a second indentation extending in a second direction intersecting the first direction, the indentations being configured to decrease an energy of a laser beam directed to the second area of the first surface of the chuck.
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