US 11,990,358 B2
Sealed substrate carriers and systems and methods for transporting substrates
Michael Robert Rice, Pleasanton, CA (US); and Jeffery C. Hudgens, San Francisco, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 3, 2023, as Appl. No. 18/130,302.
Application 15/871,855 is a division of application No. 14/503,859, filed on Oct. 1, 2014, granted, now 9,905,447, issued on Feb. 27, 2018.
Application 14/503,859 is a division of application No. 12/257,376, filed on Oct. 23, 2008, granted, now 8,870,512, issued on Oct. 28, 2014.
Application 18/130,302 is a continuation of application No. 16/716,963, filed on Dec. 17, 2019, granted, now 11,631,605.
Application 16/716,963 is a continuation of application No. 15/871,855, filed on Jan. 15, 2018, granted, now 10,553,469, issued on Feb. 4, 2020.
Claims priority of provisional application 60/983,186, filed on Oct. 27, 2007.
Prior Publication US 2023/0253228 A1, Aug. 10, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/677 (2006.01); B65D 85/00 (2006.01); H01L 21/673 (2006.01)
CPC H01L 21/67763 (2013.01) [B65D 85/70 (2013.01); H01L 21/67386 (2013.01); H01L 21/67393 (2013.01); H01L 21/67775 (2013.01); Y10S 414/137 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A semiconductor processing system comprising:
a first component forming a first chamber, wherein:
a first sealed environment in the first chamber is at a first state prior to a door being opened;
a load port structure is disposed between the first component and a second component;
the load port structure comprises a plurality of walls disposed around an opening of the load port structure;
the load port structure is separate from the first component and the second component; and
a third component is configured to change at least one of the first state of the first sealed environment within the first chamber or a second state of a second sealed environment within a second chamber formed by the second component to cause the first state and the second state to be substantially similar before the door between the first sealed environment and the second sealed environment is opened.