CPC H01L 21/67393 (2013.01) [B65G 1/14 (2013.01); H01L 21/67769 (2013.01); B65G 2201/0297 (2013.01)] | 6 Claims |
1. A storage shelf comprising:
a body frame including a base with a plate shape;
a first shelf plate with a plate shape, the first shelf plate being attached to the base with a first elastic body provided therebetween, and the first shelf plate to store thereon a first container including a first contained object;
a second shelf plate with a plate shape, the second shelf plate being attached to the base with a second elastic body provided therebetween, and the second shelf plate to store thereon a second container including a second contained object;
a first feed nozzle provided on the first shelf plate to feed gas to the first container;
a second feed nozzle provided on the second shelf plate to feed gas to the second container;
a first feed tube including a first end communicating with the first feed nozzle and a second end communicating with a main tube connected to a feed source of the gas to be fed to the first container, the main tube being supported by a support separate from the first shelf plate; and
a second feed tube including a first end communicating with the second feed nozzle and a second end communicating with the main tube connected to the feed source of the gas to be fed to the second container, the main tube being supported by the support separate from the second shelf plate; wherein
the first feed tube includes a first flexible portion having flexibility at least partially between the first end of the first feed tube and the second end of the first feed tube, and the first feed tube is provided in a first space between an upper surface of the base and a lower surface of the first shelf plate in a vertical direction of the storage shelf;
the second feed tube includes a second flexible portion having flexibility at least partially between the first end of the second feed tube and the second end of the second feed tube, and the second feed tube is provided in a second space between the upper surface of the base and a lower surface of the second shelf plate in the vertical direction of the storage shelf;
the first shelf plate has a rectangular or substantially rectangular shape in a plan view;
the first feed nozzle is located at one corner portion of the first shelf plate;
the second end of the first feed tube is located at another corner portion of the first shelf plate that is diagonally opposed to the one corner portion of the first shelf plate;
the second shelf plate has a rectangular or substantially rectangular shape in the plan view;
the second feed nozzle is located at one corner portion of the second shelf plate; and
the second end of the second feed tube is located at another corner portion of the second shelf plate that is diagonally opposed to the one corner portion of the second shelf plate.
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