US 11,990,354 B2
Method of manufacturing semiconductors using fluid delivery system
Chris Melcer, Santa Cruz, CA (US); Phillip Ryan Barros, Pleasanton, CA (US); Haruyuki Kubota, San Francisco, CA (US); Randolph Treur, San Luis Obispo, CA (US); and Todd Mark Cushman, Santa Clara, CA (US)
Assigned to ICHOR SYSTEMS, INC.
Filed by Ichor Systems, Inc., Fremont, CA (US)
Filed on Aug. 12, 2022, as Appl. No. 17/887,068.
Application 17/887,068 is a continuation of application No. 17/495,126, filed on Oct. 6, 2021.
Application 17/495,126 is a continuation of application No. 17/197,648, filed on Mar. 10, 2021, granted, now 11,158,522, issued on Oct. 26, 2021.
Application 17/197,648 is a continuation of application No. 16/151,863, filed on Oct. 4, 2018, granted, now 11,158,521, issued on Oct. 26, 2021.
Application 16/151,863 is a continuation of application No. PCT/US2017/026022, filed on Apr. 4, 2017.
Claims priority of provisional application 62/318,202, filed on Apr. 4, 2016.
Prior Publication US 2022/0384217 A1, Dec. 1, 2022
Int. Cl. F16K 27/00 (2006.01); F16J 15/10 (2006.01); F16L 43/00 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/67017 (2013.01) [F16J 15/104 (2013.01); F16J 15/106 (2013.01); F16K 27/003 (2013.01); F16L 43/00 (2013.01); Y10T 137/5109 (2015.04); Y10T 137/5283 (2015.04)] 19 Claims
OG exemplary drawing
 
1. A substrate block comprising:
an upper surface;
an inlet substrate port in the upper surface, the inlet substrate port defined by a first substrate ring, a conical portion extending from the first substrate ring, the conical portion extending along an inlet port axis;
an outlet substrate port in the upper surface, the outlet substrate port defined by a second substrate ring, a conical portion extending from the second substrate ring, the conical portion extending along an outlet port axis; and
a substrate fluid passageway extending between the inlet substrate port and the outlet substrate port along a path, the path comprising an arc having a constant radius;
wherein the inlet port axis and the outlet port axis intersect the path, the inlet port axis and the outlet port axis being non-tangent to the path; and
wherein the conical portion of the inlet substrate port joins the substrate fluid passageway at an edge, the edge being non-parallel to the upper surface.