US 11,990,324 B2
Adaptive predictive control system
Chad S. Samuels, Fort Collins, CO (US); and David Coumou, Webster, NY (US)
Assigned to Advanced Energy Industries, Inc., Denver, CO (US)
Filed by Advanced Energy Industries, Inc., Fort Collins, CO (US)
Filed on Mar. 3, 2022, as Appl. No. 17/685,898.
Prior Publication US 2023/0282462 A1, Sep. 7, 2023
Int. Cl. H01J 37/32 (2006.01); G05B 13/04 (2006.01); G05B 15/02 (2006.01); G05B 19/4155 (2006.01); H01L 21/3065 (2006.01); H01L 21/67 (2006.01)
CPC H01J 37/32926 (2013.01) [G05B 13/048 (2013.01); G05B 15/02 (2013.01); G05B 19/4155 (2013.01); H01J 37/32 (2013.01); H01J 37/32009 (2013.01); H01J 37/32449 (2013.01); H01J 37/32917 (2013.01); H01J 37/32935 (2013.01); H01J 37/32963 (2013.01); H01L 21/3065 (2013.01); H01L 21/67253 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A plasma processing system comprising:
a user interface configured to receive a reference signal defining target values for a controlled parameter that is provided to a controlled output within the system;
at least one sensor to obtain a measure of the controlled parameter that is controlled at the controlled output;
a delay/amplitude estimator configured to:
calculate a delay between the target values of the reference signal and corresponding actual parameter values of the controlled parameter achieved at the controlled output; and
provide, based upon the delay, a time-shifted amplitude error indicative of an error between the target values and the actual parameter values;
a predictive control section configured to adjust at least one actuator, based upon the delay and the time-shifted amplitude error, in advance of when an actual parameter value that is needed at an actuator output of the at least one actuator while maintaining the controlled parameter at the controlled output within a threshold range.