US 11,990,323 B2
Focus ring replacement method and plasma processing system
Shigeru Ishizawa, Miyagi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Oct. 7, 2019, as Appl. No. 16/594,422.
Application 16/594,422 is a continuation of application No. 15/642,517, filed on Jul. 6, 2017, granted, now 10,490,392.
Claims priority of application No. 2016-139681 (JP), filed on Jul. 14, 2016.
Prior Publication US 2020/0035471 A1, Jan. 30, 2020
Int. Cl. H01J 37/32 (2006.01); B08B 7/00 (2006.01)
CPC H01J 37/32807 (2013.01) [B08B 7/0035 (2013.01); H01J 37/32642 (2013.01); H01J 37/32862 (2013.01); H01J 37/32899 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A system, comprising:
a transfer device having a transfer arm with a pick on a distal end thereof, and a motor that drives a motion of the transfer arm,
the pick having a pair of arms that include portions having outermost edges that are separated from one another by a first predetermined distance;
a plasma processing apparatus that includes a process chamber, the process chamber including a support having a first surface and a second surface, the first surface being configured to support a substrate, the second surface being configured to support a first focus ring, the second surface surrounding the first surface;
at least two position detection sensors; and
a controller configured to
control the transfer device to transfer the first focus ring out of the process chamber without opening the process chamber to atmosphere,
detect a position of a second focus ring held on the transfer device, and
control the transfer device to transfer the second focus ring on the pick along a transfer path into the process chamber and place the second focus ring on the second surface based on the detected position without opening the process chamber to the atmosphere, wherein
the at least two position detection sensors are located adjacent to the process chamber, the at least two position detection sensors including a first position detection sensor and a second position detection sensor respectively positioned on opposite sides of a common position along the transfer path and separated by a second predetermined distance that is longer than the first predetermined distance of the pair of arms of the pick,
each of the first focus ring and the second focus ring includes an inner edge defining a circumference of an opening formed in each of the first focus ring and the second focus ring;
the controller is configured to detect the position of the second focus ring based on a detection of the inner edge of the second focus ring by the first position detection sensor and the second position detection sensor, and
the controller is configured to detect the position of the second focus ring based on a first waveform feature in a detection signal generated when the first position detection sensor and the second position detection sensor detect a forward edge of the inner edge of the second focus ring moving along the transfer path and passing the first position detection sensor and the second position detection sensor, and a second waveform feature in the detection signal generated when the first position detection sensor and the second position detection sensor detect a rear edge of the inner edge of the second focus ring moving along the transfer path and passing the first position detection sensor and the second position detection sensor.