US 11,990,322 B2
Ceramic susceptor
Haneum Bae, Anseong-si (KR); and Jusung Lee, Anseong-si (KR)
Assigned to MICO CERAMICS LTD., Anseong-si (KR)
Filed by MiCo Ceramics Ltd., Anseong-si (KR)
Filed on Jul. 31, 2023, as Appl. No. 18/361,958.
Claims priority of application No. 10-2022-0095402 (KR), filed on Aug. 1, 2022.
Prior Publication US 2024/0038509 A1, Feb. 1, 2024
Int. Cl. H01L 21/02 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01); C23C 16/505 (2006.01)
CPC H01J 37/32724 (2013.01) [H01J 37/32577 (2013.01); H01L 21/68792 (2013.01); C23C 16/505 (2013.01); H01J 37/32082 (2013.01); H01J 2237/002 (2013.01); H01J 2237/24585 (2013.01); H01J 2237/3321 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A ceramic susceptor comprising:
an insulating plate in which a RF electrode is disposed;
a shaft connected to the insulating plate at one end and comprising a separator at a remaining end;
a connection mount having an upper portion connected to the remaining end of the shaft;
a first rod and a second rod connected to the RF electrode and penetrating the separator to extend into the connection mount; and
a connection member disposed in the connection mount and connecting the first rod and the second rod extending into the connection mount to a draw-in rod,
wherein the connection member comprises:
a first coupling member configured to couple the first rod;
a second coupling member configured to couple the second rod;
a third coupling member configured to couple the draw-in rod; and
an elastic member, and
wherein the first, second, and third coupling members formed separately from each other form one body with the elastic member through each coupling with the elastic member.