CPC H01J 37/28 (2013.01) [H01J 37/153 (2013.01); H01J 2237/1532 (2013.01); H01J 2237/1534 (2013.01); H01J 2237/20207 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/2817 (2013.01)] | 20 Claims |
1. A method, comprising:
with a charged particle beam microscope system operating in a transmission imaging mode, directing a charged particle beam to a sample including applying a time series of beam tilts in a pattern to the charged particle beam to produce a sequence of images, wherein at least some of the images in the sequence of images are captured while the charged particle beam is transitioning between one beam tilt in the time series of beam tilts and a sequentially adjacent beam tilt in the time series of beam tilts, and wherein the pattern is configured to induce image changes between the images in the sequence of images that are indicative of optical aberrations in the charged particle beam microscope system; and
capturing the sequence of images.
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