US 11,990,312 B2
Specimen machining device and specimen machining method
Shogo Kataoka, Tokyo (JP); and Koji Todoroki, Tokyo (JP)
Assigned to JEOL Ltd., Tokyo (JP)
Filed by JEOL Ltd., Tokyo (JP)
Filed on Feb. 24, 2022, as Appl. No. 17/679,303.
Claims priority of application No. 2021-031185 (JP), filed on Feb. 26, 2021.
Prior Publication US 2022/0277925 A1, Sep. 1, 2022
Int. Cl. H01J 37/20 (2006.01); H01J 37/30 (2006.01)
CPC H01J 37/20 (2013.01) [H01J 37/30 (2013.01); H01J 2237/20214 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A specimen machining device comprising:
an ion source which irradiates a specimen with an ion beam;
a first rotating body that holds the specimen and is rotatable about a first axis serving as a rotation axis; and
a second rotating body on which the first rotating body is disposed and which is rotatable about a second axis serving as a rotation axis different from the first axis,
wherein
the first axis and the second axis are parallel to each other,
the specimen is moved by combining a first rotation of the specimen caused by rotation of the first rotating body with a second rotation of the specimen caused by rotation of the second rotating body, and
the specimen which is being moved by a combination of the first and second rotations is irradiated with the ion beam.