| CPC H01J 35/065 (2013.01) [H01J 1/304 (2013.01); H01J 19/24 (2013.01); H01J 35/064 (2019.05); H01J 2235/062 (2013.01); H01J 2235/064 (2013.01)] | 11 Claims |
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1. An electric field radiation device comprising:
a vacuum enclosure having a vacuum chamber at an inner circumferential side of a tubular insulator whose both ends are sealed;
an emitter positioned at one side in both end directions in the vacuum chamber and having an electron generating portion that faces the other side in the both end directions of the vacuum chamber;
a guard electrode arranged at an outer circumferential side of the electron generating portion of the emitter;
a target positioned at the other side in the both end directions in the vacuum chamber and provided so as to face the electron generating portion of the emitter;
a movable emitter supporting unit supporting the emitter movably in both end directions of the vacuum chamber;
an emitter supporting unit female screw bore opening on the one side in the both end directions at the emitter supporting unit and having a screw bore that extends in the both end directions;
bellows having a tubular shape having a larger diameter than the emitter supporting unit female screw bore and expanding and contracting in the both end directions, wherein the bellows are arranged so that an axis of the tubular bellows extends coaxially with the screw bore of the emitter supporting unit female screw bore, one end side of the tubular bellows is retained by one side in the both end directions of the vacuum enclosure and the other end side of the tubular bellows is retained by an outer circumferential side of the emitter supporting unit, and form a part of the vacuum chamber;
an emitter supporting unit operation hole penetrating an inner circumferential side of the bellows in the both end directions at the one side in the both end directions of the vacuum enclosure and extending in the both end directions so that an axis of the emitter supporting unit operation hole is arranged coaxially with the screw bore of the emitter supporting unit female screw bore, the emitter supporting unit operation hole having a diameter that is larger than an opening diameter of the emitter supporting unit female screw bore; and
either one of a position adjustment shaft insertable into the emitter supporting unit operation hole and the emitter supporting unit female screw bore or a pressing shaft insertable into the emitter supporting unit operation hole, wherein
an opening edge surface of the emitter supporting unit female screw bore extends along a radial direction of the emitter supporting unit female screw bore,
the emitter supporting unit operation hole has a shape into which one selected from the position adjustment shaft and the pressing shaft is insertable from shaft tip sides of the position adjustment shaft and the pressing shaft,
the position adjustment shaft is configured to be turned with the position adjustment shaft inserted in the emitter supporting unit operation hole, and is provided, on an outer circumferential surface of a tip of the position adjustment shaft, with a tip side male screw portion configured to be screwed into the emitter supporting unit female screw bore, and
the pressing shaft has, at a tip thereof, a tip surface having a larger diameter than the opening diameter of the emitter supporting unit female screw bore and extending along a radial direction of the pressing shaft.
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