US 11,990,273 B2
Manufacturing method of thin-film power inductor and thin-film power inductor
Quan Zhu, Dongyang (CN); Yangdong Yu, Dongyang (CN); Gan Liu, Dongyang (CN); and Leijie Wang, Dongyang (CN)
Assigned to Hengdian Group DMEGC Magnetics Co., LTD, Jinhua (CN)
Appl. No. 17/415,550
Filed by Hengdian Group DMEGC Magnetics Co., LTD, Dongyang (CN)
PCT Filed Nov. 27, 2020, PCT No. PCT/CN2020/132139
§ 371(c)(1), (2) Date Jun. 17, 2021,
PCT Pub. No. WO2022/057089, PCT Pub. Date Mar. 24, 2022.
Claims priority of application No. 202010966367.4 (CN), filed on Sep. 15, 2020.
Prior Publication US 2023/0215624 A1, Jul. 6, 2023
Int. Cl. H01F 7/06 (2006.01); H01F 41/02 (2006.01); H01F 41/04 (2006.01)
CPC H01F 41/0233 (2013.01) [H01F 41/043 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A manufacturing method of a thin-film power inductor, comprising:
evenly mixing an alloy powder with a plasticizer, an adhesive, curing agent, a dispersing agent and an organic solvent to form a slurry; evenly applying the slurry on a polyethylene terephthalate (PET) film, and drying the PET film coated with the slurry to form a magnetic band;
cutting the magnetic band to form a plurality of magnetic sheets;
opening a hole on some of the plurality of magnetic sheets to form hole-shaped magnetic sheets;
processing electrodes on an insulating substrate to form a coil layer, wherein a shape of each of the electrodes is consistent with a shape of the hole of a respective one of the hole-shaped magnetic sheets;
sequentially stacking and pressing one of the plurality of magnetic sheets, one of the hole-shaped magnetic sheets, the coil layer, another one of the hole-shaped magnetic sheets and another one of the plurality of the magnetic sheets to form a block, wherein the one of the hole-shaped magnetic sheets, the another one of the hole-shaped magnetic sheets and the coil layer are aligned with each other and stacked, and each of the electrodes is disposed in the hole of the respective one of the hole-shaped magnetic sheets;
secondarily pressing the block, and cutting the secondarily pressed block to form an individual product;
baking the cut individual product formed by cutting to form a main body;
applying a silver paste on two ends of the main body to form outer electrodes respectively such that the outer electrodes are electrically connected to the electrodes respectively; and
electroplating a nickel layer and a tin layer on a surface of each of the outer electrodes to form the thin-film power inductor.