CPC H01F 27/2804 (2013.01) [H01F 27/29 (2013.01); H01F 41/041 (2013.01); H01G 4/005 (2013.01); H01G 4/232 (2013.01); H01G 4/236 (2013.01); H01G 4/33 (2013.01); H01L 28/10 (2013.01); H01L 28/60 (2013.01); H01G 4/1245 (2013.01)] | 20 Claims |
1. A miniature transmission line comprising:
a semiconductor substrate constraining a maximum size of the transmission line; and
a plurality of metal conductive legs overlying the semiconductor substrate, said metal conductive legs disposed with spacing therebetween;
the metal conductive legs being configured with a high aspect ratio defined as a thickness dimension greater than a width dimension and wherein the metal conductive legs are spaced to attain a tight coupling condition defined as a high coupling coefficient across multiple legs, wherein each of the metal conductive legs have a silicon core extending along a length of the metal conductive leg and metal extending along both sidewalls of the silicon core, and immediately adjacent metal conductive legs include a first leg and a second leg, the first leg and the second leg separated by a first metal extending along a first sidewall of the silicon core of the first leg and a second metal extending along a second sidewall of the silicon core of the second leg, the first metal and the second metal separated by a material having a composition that is different from that of the silicon core and different from that of the first metal and the second metal.
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