US 11,989,887 B2
Processing system, measuring probe, shape measuring device, and program
Tomoaki Yamada, Yokohama (JP)
Assigned to NIKON CORPORATION, Tokyo (JP)
Appl. No. 16/956,638
Filed by NIKON CORPORATION, Tokyo (JP)
PCT Filed Dec. 25, 2017, PCT No. PCT/JP2017/046349
§ 371(c)(1), (2) Date Nov. 16, 2020,
PCT Pub. No. WO2019/130379, PCT Pub. Date Jul. 4, 2019.
Prior Publication US 2021/0082126 A1, Mar. 18, 2021
Int. Cl. G06T 7/20 (2017.01); G01B 11/03 (2006.01); G01B 11/25 (2006.01); H02P 21/18 (2016.01)
CPC G06T 7/20 (2013.01) [G01B 11/03 (2013.01); G01B 11/2518 (2013.01); H02P 21/18 (2016.02)] 7 Claims
OG exemplary drawing
 
1. A processing system comprising:
a machine tool including a measuring unit which outputs measurement information for calculating a shape of a processing object;
a control unit which generates position information related to a position of the measuring unit at a time of measuring the processing object by the measuring unit and outputs the generated position information and a generation time signal indicating a time at which the position information was generated;
an acquisition unit which acquires the output position information and the generation time signal;
an estimation unit which estimates the time at which the position information was generated based on a time at which the acquisition unit acquired the generation time signal and by estimating a jitter of the time at which the generation time signal was output by the control unit; and
a shape calculation unit which calculates a shape of the processing object based on the measurement information, the position information, and the time estimated by the estimation unit.