US 11,989,499 B2
Method and apparatus for adjusting metal wiring density
Chuanjiang Chen, Hefei (CN); Li Tang, Hefei (CN); Li Bai, Hefei (CN); and Kang Zhao, Hefei (CN)
Assigned to Changxin Memory Technologies, Inc., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Jan. 11, 2022, as Appl. No. 17/647,619.
Application 17/647,619 is a continuation of application No. PCT/CN2021/113422, filed on Aug. 19, 2021.
Claims priority of application No. 202110762129.6 (CN), filed on Jul. 6, 2021.
Prior Publication US 2023/0014017 A1, Jan. 19, 2023
Int. Cl. G06F 30/394 (2020.01); G06F 30/392 (2020.01)
CPC G06F 30/394 (2020.01) [G06F 30/392 (2020.01)] 16 Claims
OG exemplary drawing
 
1. A method for adjusting metal wiring density, comprising:
detecting metal wiring density in each of metal density detection windows in a target layout;
when there is a target metal density detection window in which the metal wiring density is greater than a preset density threshold among the metal density detection windows, cropping a power fill mesh in the target metal density detection window;
returning to detect the metal wiring density in each of the metal density detection windows in the target layout, until the metal wiring density in each of the metal density detection windows in the target layout is less than or equal to the preset density threshold;
wherein before the detecting metal wiring density in each of metal density detection windows in a target layout, the method for adjusting metal wiring density further comprises:
adding power fill meshes to an initial layout, to form the target layout, wherein the initial layout comprises initial metal wires;
when the metal wiring density in each of the metal density detection windows in the target layout is less than or equal to the preset density threshold, detecting whether there is a blank gap between cropped power fill meshes in the target layout and ends of the initial metal wires in the target layout; and
when there is the blank gap between the cropped power fill meshes in the target layout and the ends of the initial metal wires in the target layout, adding the power fill meshes to the blank gap.