US 11,989,497 B2
Methods of designing layout of semiconductor device and methods for manufacturing semiconductor device using the same
Sungwe Cho, Hwaseong-si (KR)
Assigned to Samsung Electronics Co., Ltd., (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Nov. 2, 2021, as Appl. No. 17/517,126.
Claims priority of application No. 10-2021-0008813 (KR), filed on Jan. 21, 2021.
Prior Publication US 2022/0229965 A1, Jul. 21, 2022
Int. Cl. G06F 30/392 (2020.01); G06F 30/398 (2020.01); H01L 27/02 (2006.01); G06F 111/04 (2020.01)
CPC G06F 30/392 (2020.01) [G06F 30/398 (2020.01); H01L 27/0207 (2013.01); G06F 2111/04 (2020.01)] 11 Claims
OG exemplary drawing
 
1. A method of designing a layout of a semiconductor device, comprising:
preparing a standard cell library comprising information on standard cells;
determining a common active pattern in consideration of a local layout effect based on the standard cell library;
adding a common pattern region comprising the common active pattern to opposite sides of the standard cells, respectively; and
arranging the standard cells comprising the common pattern region,
wherein the standard cells comprise a first standard cell and a second standard cell that are adjacent to each other,
wherein, in the arranging the standard cells,
responsive to a width of the common active pattern being identical to a width of active patterns in the first and second standard cells, the common pattern region is arranged to overlap the first and second standard cells, and
responsive to the width of the common active pattern being different from the width of the active patterns in at least one of the first standard cell or the second standard cell, the common pattern region is arranged to be shared between the first and second standard cells.