US 11,989,495 B2
Systems and methods for predicting film thickness using virtual metrology
Debkalpo Das, Tamil Nadu (IN); Raman K Nurani, Chennai (IN); Ramachandran Subramanian, Chennai (IN); Bibhavendra Singh, Lucknow (IN); and Bharath Sundar, Chennai (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 31, 2020, as Appl. No. 17/139,330.
Prior Publication US 2022/0207223 A1, Jun. 30, 2022
Int. Cl. G06F 30/33 (2020.01); G06F 18/213 (2023.01); G06F 18/214 (2023.01); H01L 21/70 (2006.01)
CPC G06F 30/33 (2020.01) [G06F 18/213 (2023.01); G06F 18/214 (2023.01); H01L 21/702 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A method comprising:
obtaining sensor data associated with a deposition process performed in a process chamber to deposit film on a surface of a substrate;
generating a plurality of physics based outputs using a transformation function and the sensor data, wherein the transformation function comprises functions associated with at least one of chemical kinetics or Langmuir adsorption model;
mapping the physics based outputs to a training set; and
training a virtual model based on the training set and the sensor data, wherein the virtual model is trained to generate predictive metrology data associated with the film.