CPC G06F 30/33 (2020.01) [G06F 18/213 (2023.01); G06F 18/214 (2023.01); H01L 21/702 (2013.01)] | 23 Claims |
1. A method comprising:
obtaining sensor data associated with a deposition process performed in a process chamber to deposit film on a surface of a substrate;
generating a plurality of physics based outputs using a transformation function and the sensor data, wherein the transformation function comprises functions associated with at least one of chemical kinetics or Langmuir adsorption model;
mapping the physics based outputs to a training set; and
training a virtual model based on the training set and the sensor data, wherein the virtual model is trained to generate predictive metrology data associated with the film.
|