CPC G03F 7/70716 (2013.01) | 20 Claims |
1. A substrate table for supporting a substrate, the substrate table comprising:
a surface; and
coarse burls disposed on and spaced across the surface, wherein each of the coarse burls comprises:
a burl-top surface; and
deterministic fine burls disposed on the burl-top surface and configured to contact the substrate when the substrate table supports the substrate, wherein the burl-top surface comprises a roughened area disposed among the fine burls.
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