US 11,988,967 B2
Target material supply apparatus and method
Jon David Tedrow, San Diego, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/280,969
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Oct. 24, 2019, PCT No. PCT/US2019/057945
§ 371(c)(1), (2) Date Mar. 29, 2021,
PCT Pub. No. WO2020/086902, PCT Pub. Date Apr. 30, 2020.
Claims priority of provisional application 62/750,321, filed on Oct. 25, 2018.
Prior Publication US 2021/0311399 A1, Oct. 7, 2021
Int. Cl. G03F 7/00 (2006.01); H01J 37/34 (2006.01)
CPC G03F 7/70033 (2013.01) [H01J 37/3426 (2013.01)] 29 Claims
OG exemplary drawing
 
1. An apparatus for supplying a target material, the apparatus comprising:
a reservoir system comprising a reservoir in fluid communication with a nozzle supply system;
a priming system comprising:
a priming chamber defining a primary cavity; and
a removable carrier configured to be received in the primary cavity, the removable carrier defining a secondary cavity configured to receive a solid matter that includes the target material; and
a transport system that extends from the priming system to the reservoir system, the transport system configured to provide a fluid flow path between the priming system and the reservoir system.