US 11,988,966 B2
Gas monitoring system
Andrei Dorobantu, San Diego, CA (US); and Shreyas Bhaban, Minneapolis, MN (US)
Assigned to Cymer, LLC, San Diego, CA (US)
Appl. No. 15/734,359
Filed by Cymer, LLC, San Diego, CA (US)
PCT Filed May 16, 2019, PCT No. PCT/US2019/032615
§ 371(c)(1), (2) Date Dec. 2, 2020,
PCT Pub. No. WO2019/240906, PCT Pub. Date Dec. 19, 2019.
Claims priority of provisional application 62/684,352, filed on Jun. 13, 2018.
Prior Publication US 2021/0226407 A1, Jul. 22, 2021
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01); H01S 3/036 (2006.01); H01S 3/097 (2006.01); H01S 3/10 (2006.01); H01S 3/134 (2006.01); H01S 3/225 (2006.01); H01S 3/23 (2006.01)
CPC G03F 7/70025 (2013.01) [G03F 7/70483 (2013.01); H01S 3/036 (2013.01); H01S 3/097 (2013.01); H01S 3/10069 (2013.01); H01S 3/134 (2013.01); H01S 3/225 (2013.01); H01S 3/2308 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A system comprising:
an optical source configured to emit a pulsed light beam, the optical source comprising one or more chambers, each of the one or more chambers configured to hold a gaseous gain medium, the gaseous gain medium being associated with an assumed gas life;
at least one detection module configured to:
receive and analyze data related to the pulsed light beam, and
produce a beam quality metric based on the data related to the pulsed light beam; and
a monitoring module configured to:
determine whether a health status of the gaseous gain medium is good based on a comparison between the beam quality metric and a threshold specific to the data that produced the beam quality metric, and
if it is determined that the health status is good, issue a command signal indicating to extend use of the gaseous gain medium beyond the assumed gas life.