CPC G03F 7/0042 (2013.01) [G03F 7/0043 (2013.01); G03F 7/09 (2013.01); G03F 7/20 (2013.01); G03F 7/2002 (2013.01); G03F 7/2037 (2013.01); G03F 7/30 (2013.01); G03F 7/32 (2013.01); G03F 7/322 (2013.01); G03F 7/325 (2013.01)] | 21 Claims |
1. A method for patterning a substrate with radiation, the method comprising:
irradiating a coated substrate along a selected pattern, wherein the coated substrate comprises a coating that comprises EUV radiation sensitive metal-carbon bonds, wherein exposure of the coating material to EUV radiation at a dose from about 3 mJ/cm2 to 150 mJ/cm2 alters the chemical properties of the coating material to create an exposed coating material with differential dissolution rates between exposed and un-exposed regions of the coating material and wherein the irradiated regions are at least partially condensed to increase metal oxide character, wherein the metal of the metal—carbon bonds consists of Sn, Sb, In or a combination thereof.
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