US 11,988,909 B2
Faraday rotators, optical isolators, driver laser arrangements and EUV radiation generation apparatus
Steffen Erhard, Korntal-Muenchingen (DE)
Assigned to TRUMPF Lasersystems for Semiconductor Manufacturing GmbH, Ditzingen (DE)
Filed by TRUMPF Lasersystems for Semiconductor Manufacturing GmbH, Ditzingen (DE)
Filed on Aug. 18, 2020, as Appl. No. 16/996,238.
Application 16/996,238 is a continuation of application No. PCT/EP2018/054005, filed on Feb. 19, 2018.
Prior Publication US 2020/0379281 A1, Dec. 3, 2020
Int. Cl. G02F 1/09 (2006.01); G02B 1/12 (2006.01)
CPC G02F 1/093 (2013.01) [G02F 1/091 (2013.01); G02B 1/12 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A system for EUV radiation generation, the system comprising:
a driver laser system comprising:
a beam source configured to generate at least one laser beam propagating in a first direction;
an amplifier system comprising at least one optical amplifier configured to amplify the laser beam propagating in the first direction; and
at least one optical isolator configured to suppress laser radiation propagating in a second direction opposite to the first direction,
wherein the optical isolator comprises:
at least one Faraday rotator; and
a first polarizer and a second polarizer, between which the Faraday rotator is arranged,
wherein the Faraday rotator comprises:
a disk-shaped magneto-optical solid-state medium;
a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium;
a heat sink with a support surface for the magneto-optical solid-state medium;
a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium, the first side facing away from the support surface; and
a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to the first side of the magneto-optical solid-state medium,
wherein the deflector is configured to deflect the laser beam back to a second impingement region that at least partly overlaps with the first impingement region on the first side of the magneto-optical solid-state medium.