US 11,988,907 B1
Electric field-tunable IR devices with very large modulation of refractive index and methods to fabricate them
Kyung-Ah Son, Moorpark, CA (US); Jeong-Sun Moon, Moorpark, CA (US); Hwa Chang Seo, Malibu, CA (US); Richard M. Kremer, Ramona, CA (US); and Ryan G. Quarfoth, Malibu, CA (US)
Assigned to HRL LABORATORIES, LLC, Malibu, CA (US)
Filed by HRL Laboratories, LLC, Malibu, CA (US)
Filed on Mar. 25, 2021, as Appl. No. 17/212,611.
Claims priority of provisional application 63/094,756, filed on Oct. 21, 2020.
Claims priority of provisional application 63/027,847, filed on May 20, 2020.
Claims priority of provisional application 63/027,838, filed on May 20, 2020.
Claims priority of provisional application 63/027,849, filed on May 20, 2020.
Claims priority of provisional application 63/027,844, filed on May 20, 2020.
Claims priority of provisional application 63/027,841, filed on May 20, 2020.
Int. Cl. G02F 1/19 (2019.01); G02F 1/03 (2006.01)
CPC G02F 1/0316 (2013.01) [G02F 1/0333 (2013.01); G02F 1/19 (2013.01); G02F 2203/11 (2013.01)] 28 Claims
OG exemplary drawing
 
1. An electric field-controlled refractive index tunable device comprising:
a phase change correlated transition metal oxide layer; and
E-field responsive charge dopants, wherein the E-field responsive charge dopants either accumulate in the phase change correlated transition metal oxide layer or are depleted from the phase change correlated transition metal oxide layer in response to an E-field applied to the phase change correlated transition metal oxide layer;
wherein the phase change correlated transition metal oxide layer has an optical extinction coefficient k of less than 0.01.