US 11,988,727 B1
Magnetostrictive MEMS magnetic gradiometer
Randall L. Kubena, Oak Park, CA (US); and Walter S. Wall, Calabasas, CA (US)
Assigned to HRL LABORATORIES, LLC, Malibu, CA (US)
Filed by HRL Laboratories, LLC, Malibu, CA (US)
Filed on Jul. 17, 2020, as Appl. No. 16/932,427.
Claims priority of provisional application 62/881,063, filed on Jul. 31, 2019.
Int. Cl. G01R 33/022 (2006.01); H03B 5/32 (2006.01); H10N 30/87 (2023.01); H10N 35/80 (2023.01); H10N 35/85 (2023.01)
CPC G01R 33/022 (2013.01) [H03B 5/323 (2013.01); H10N 35/80 (2023.02); H10N 35/85 (2023.02); H10N 30/871 (2023.02)] 27 Claims
OG exemplary drawing
 
1. A magnetic gradiometer sensor comprising a substrate with at least a pair of resonators disposed thereon, wherein each of the at least a pair of resonators is at least partially covered or coated with a magnetostrictive film; wherein an incident magnetic field on the magnetostrictive film changes the operation of the resonator, which change can be used as a measurement of an amplitude of the incident magnetic field.