US 11,988,708 B2
Exposure monitor device
Edward John Coyne, Athenry (IE); Alan J. O'Donnell, Castletroy (IE); Shaun Bradley, Murroe (IE); David Aherne, Limerick (IE); David Boland, Limerick (IE); Thomas G. O'Dwyer, Arlington, MA (US); Colm Patrick Heffernan, Annacotty (IE); Kevin B. Manning, Andover, MA (US); Mark Forde, Nenagh (IE); David J. Clarke, Patrickswell (IE); and Michael A. Looby, Ballysheedy (IE)
Assigned to Analog Devices International Unlimited Company, Limerick (IE)
Filed by Analog Devices International Unlimited Company, Limerick (IE)
Filed on May 16, 2023, as Appl. No. 18/318,506.
Application 18/318,506 is a continuation of application No. 17/652,857, filed on Feb. 28, 2022, granted, now 11,686,763.
Application 17/652,857 is a continuation of application No. 17/062,225, filed on Oct. 2, 2020, granted, now 11,269,006, issued on Mar. 8, 2022.
Application 17/062,225 is a continuation of application No. 16/513,562, filed on Jul. 16, 2019, granted, now 10,794,950, issued on Oct. 6, 2020.
Application 16/513,562 is a continuation of application No. 15/490,584, filed on Apr. 18, 2017, granted, now 10,365,322, issued on Jul. 30, 2019.
Application 15/490,584 is a continuation in part of application No. 15/291,742, filed on Oct. 12, 2016, granted, now 10,338,132, issued on Jul. 2, 2019.
Claims priority of provisional application 62/455,481, filed on Feb. 6, 2017.
Claims priority of provisional application 62/447,824, filed on Jan. 18, 2017.
Claims priority of provisional application 62/324,828, filed on Apr. 19, 2016.
Prior Publication US 2023/0366924 A1, Nov. 16, 2023
Int. Cl. G01R 31/28 (2006.01); G01N 27/04 (2006.01)
CPC G01R 31/2879 (2013.01) [G01N 27/041 (2013.01); G01R 31/2874 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An exposure monitor system, comprising:
a substrate; and
a plurality of monitor devices distributed over the substrate and electrically coupled to each other,
wherein at least one of the monitor devices is configured such that an exposure of the monitor devices to a stress condition causes atomic diffusion of a diffusant from a first region to a second region within each of the at least one of the monitor devices, and
wherein the atomic diffusion causes a measurable change in an electrical characteristic of the at least one of the monitor devices.