US 11,988,686 B2
Vertical probe card and fence-like probe thereof
Wei-Jhih Su, Taichung (TW); Chao-Hui Tseng, New Taipei (TW); Hao-Yen Cheng, Taoyuan (TW); and Mei-Hui Chen, Taoyuan (TW)
Assigned to CHUNGHWA PRECISION TEST TECH. CO., LTD., Taoyuan (TW)
Filed by CHUNGHWA PRECISION TEST TECH. CO., LTD., Taoyuan (TW)
Filed on Nov. 3, 2022, as Appl. No. 17/980,535.
Claims priority of application No. 111112383 (TW), filed on Mar. 31, 2022.
Prior Publication US 2023/0314478 A1, Oct. 5, 2023
Int. Cl. G01R 31/00 (2006.01); G01R 1/073 (2006.01)
CPC G01R 1/07314 (2013.01) [G01R 1/07364 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A vertical probe card, comprising:
a first guiding board unit and a second guiding board unit that is spaced apart from the first guiding board unit; and
a plurality of fence-like probes passing through the first guiding board unit and the second guiding board unit, wherein each of the fence-like probes has a probe length within a range from 5 mm to 8 mm, and each of the fence-like probes includes:
a fence-like segment having an elongated shape defining a longitudinal direction, wherein the fence-like segment has a penetrating slot that is formed along the longitudinal direction and that has a length greater than 65% of the probe length;
a ceramic layer directly formed on an outer surface of the fence-like segment and covering two long walls of the penetrating slot, wherein the ceramic layer is not arranged in the first guiding board unit and the second guiding board unit; and
a connection segment and a testing segment that are respectively connected to two end portions of the fence-like segment and that respectively pass through the first guiding board unit and the second guiding board unit;
wherein, when the first guiding board unit and the second guiding board unit are staggered with each other, the fence-like segments of the fence-like probes elastically bend in a same direction.