US 11,988,685 B2
Vibration rectification error correction device, sensor module, and vibration rectification error correction method
Masayoshi Todorokihara, Suwa (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Dec. 27, 2021, as Appl. No. 17/562,054.
Claims priority of application No. 2020-219505 (JP), filed on Dec. 28, 2020.
Prior Publication US 2022/0206036 A1, Jun. 30, 2022
Int. Cl. G01P 15/00 (2006.01)
CPC G01P 15/00 (2013.01) 9 Claims
OG exemplary drawing
 
1. A vibration rectification error correction device comprising:
a reference signal generation circuit configured to output a reference signal;
a first frequency delta-sigma modulation circuit configured to perform frequency delta-sigma modulation on the reference signal by using a first measured signal to generate a first frequency delta-sigma modulated signal;
a first timing control circuit configured to:
receive the first frequency delta-sigma modulated signal, the reference signal, and the first measured signal;
generate a first timing signal based on a reference count value of the number of pulses of the reference signal; and
control a timing of outputting a first count value as an output signal in synchronization with the first timing signal;
a first filter configured to:
receive the first count value as the output signal of the first timing control circuit; and
filter the first count value in synchronization with the first timing signal to generate a second count value as an output signal of the first filter;
a latch circuit configured to:
latch the second count value as the output signal from the first filter; and
hold the latched second count value as a third count value; and
a second filter configured to:
receive the third count value as an output signal of the latch circuit; and
filter the third count value in synchronization with the reference signal to generate a fourth count value as an output signal of the second filter.