CPC G01N 27/622 (2013.01) [G01N 27/66 (2013.01)] | 17 Claims |
1. An ion generation apparatus comprising:
an electron emission device;
an opposite electrode; and
a controller, wherein
the electron emission device includes a lower electrode, a surface electrode, and an intermediate layer provided between the lower electrode and the surface electrode,
the opposite electrode is provided to be opposite the surface electrode, and
the controller is provided to apply a voltage to the surface electrode, the lower electrode, or the opposite electrode such that a potential of the surface electrode becomes higher than both a potential of the lower electrode and a potential of the opposite electrode in a positive ion mode for generating positive ions from a gas component near the surface electrode by electrons emitted from the surface electrode, the positive ions travel toward the opposite electrode, and the positive ions are generated from the gas component between the surface electrode and the opposite electrode.
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