US 11,988,629 B2
Method of manufacturing a graphene-based biological field-effect transistor
Sung H. Lim, Mountain View, CA (US); Eric Lewis Danielson, Santa Clara, CA (US); Maurizio Tarsia, San Carlos, CA (US); and Gary Robert Larsen, San Jose, CA (US)
Assigned to Lyten, Inc., San Jose, CA (US)
Filed by Lyten, Inc., San Jose, CA (US)
Filed on Jul. 22, 2021, as Appl. No. 17/382,661.
Application 17/382,661 is a continuation in part of application No. 17/354,175, filed on Jun. 22, 2021, abandoned.
Claims priority of provisional application 63/042,808, filed on Jun. 23, 2020.
Prior Publication US 2021/0396709 A1, Dec. 23, 2021
Int. Cl. H01L 29/16 (2006.01); G01N 27/414 (2006.01); H01L 29/66 (2006.01)
CPC G01N 27/4145 (2013.01) [H01L 29/1606 (2013.01); H01L 29/66045 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A method of fabricating a biological field-effect transistor (BioFET), the method comprising:
preparing a carbonaceous dispersion by adding a three-dimensional (3D) graphene into a solvent;
depositing the carbonaceous dispersion onto a p-type silicon wafer;
spin-coating a positive photoresist over the carbonaceous dispersion by placing a photomask with an image of an array of graphene field effect transistors (FETs) over the p-type wafer and exposing the p-type wafer to ultraviolet (UV) light;
forming source and drain terminals on the p-type silicon wafer, the source and drain terminals in contact with the 3D graphene of the carbonaceous dispersion;
removing residual photoresist from the carbonaceous dispersion by placing the p-type silicon wafer in 1-methyl-2-pyrrolidone (NMP); and
biofunctionalizing the carbonaceous dispersion with a molecular recognition element configured to alter one or more electrical properties of the Bio-FET in response to exposure of the molecular recognition element to the analyte.