US 11,988,618 B2
Method and system to determine crystal structure
Bart Buijsse, Eindhoven (NL); Hans Raaijmakers, Eindhoven (NL); and Peter Christiaan Tiemeijer, Eindhoven (NL)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Mar. 31, 2021, as Appl. No. 17/219,627.
Prior Publication US 2022/0317067 A1, Oct. 6, 2022
Int. Cl. G01N 23/2055 (2018.01); G01N 23/20025 (2018.01); G01N 23/207 (2018.01)
CPC G01N 23/2055 (2013.01) [G01N 23/20025 (2013.01); G01N 23/207 (2013.01); G01N 2223/0565 (2013.01); G01N 2223/102 (2013.01); G01N 2223/604 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
acquiring a first diffraction tilt series of a sample, wherein each diffraction pattern in the first diffraction tilt series has a first electron dose and a first magnification;
acquiring a second diffraction tilt series of the sample, wherein each diffraction pattern in the second diffraction tilt series has a second electron dose and a second magnification; and
solving a molecular structure of a crystal based on the first diffraction tilt series and the second diffraction tilt series.