US 11,988,611 B2
Systems for parsing material properties from within SHG signals
Viktor Koldiaev, Morgan Hill, CA (US); Marc Christopher Kryger, Fountain Valley, CA (US); John Paul Changala, Tustin, CA (US); and Jianing Shi, Sunnyvale, CA (US)
Assigned to FemtoMetrix, Inc., Los Angeles, CA (US)
Filed by FemtoMetrix, Inc., Irvine, CA (US)
Filed on Nov. 12, 2021, as Appl. No. 17/454,759.
Application 17/454,759 is a division of application No. 16/724,042, filed on Dec. 20, 2019, granted, now 11,199,507.
Application 16/724,042 is a division of application No. 14/939,750, filed on Nov. 12, 2015, granted, now 10,551,325.
Claims priority of provisional application 62/078,636, filed on Nov. 12, 2014.
Prior Publication US 2022/0317060 A1, Oct. 6, 2022
Int. Cl. G01N 21/95 (2006.01); G01N 21/63 (2006.01); H01L 21/66 (2006.01)
CPC G01N 21/9501 (2013.01) [G01N 21/63 (2013.01); H01L 22/12 (2013.01); G01N 2201/06113 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An automated method of characterizing electrical properties of a sample, the method comprising:
directing a beam of electro-magnetic radiation to a sample using an optical source thereby producing Second Harmonic Generation (SHG);
receiving a signal comprising an SHG signal; and
under the control of a hardware computing device:
processing the received signal to extract features from the SHG signal related to the electrical properties of the sample, wherein features from the SHG signal are extracted at least in part by applying a transform to the SHG signal; and
correlating the extracted features to one or more electrical properties of the sample.