US 11,988,600 B2
Gas sensor MEMS structures and methods of fabrication thereof
Enrico Macrelli, Singapore (SG); Massimo Bruno Cristiano Alioto, Singapore (SG); Chengkuo Lee, Singapore (SG); Costas John Spanos, Berkeley, CA (US); and You Qian, Singapore (SG)
Assigned to National University of Singapore, Singapore (SG); and The Regents of the University of California, Oakland, CA (US)
Appl. No. 16/467,091
Filed by National University of Singapore, Singapore (SG); and The Regents of the University of California, Oakland, CA (US)
PCT Filed Dec. 8, 2017, PCT No. PCT/SG2017/050609
§ 371(c)(1), (2) Date Jun. 6, 2019,
PCT Pub. No. WO2018/106193, PCT Pub. Date Jun. 14, 2018.
Claims priority of provisional application 62/432,180, filed on Dec. 9, 2016.
Claims priority of application No. 10201610369X (SG), filed on Dec. 9, 2016.
Prior Publication US 2019/0360924 A1, Nov. 28, 2019
Int. Cl. G01N 33/00 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01N 21/3504 (2014.01); H10N 10/01 (2023.01); H10N 10/80 (2023.01)
CPC G01N 21/3504 (2013.01) [B81B 3/0083 (2013.01); B81C 1/00246 (2013.01); G01N 33/0031 (2013.01); H10N 10/01 (2023.02); H10N 10/80 (2023.02); B81B 2203/0315 (2013.01); B81B 2207/07 (2013.01); B81C 2203/0714 (2013.01); G01N 2201/02 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A gas sensor comprising:
a first micro electro-mechanical system (MEMS) die comprising a light source;
a second MEMS die comprising a light detector;
a sample chamber disposes in an optical path between the light source and the light detector; and
a holder substrate;
wherein the first and second MEMS dies are disposed on the holder substrate in a vertical orientation relative to the holder substrate, and with the sample chamber disposed laterally there between;
wherein the sample chamber comprises a waveguide diffusion chamber, and
wherein opposing open ends of the waveguide diffusion chamber function as diffusion apertures.