CPC G01N 21/3504 (2013.01) [B81B 3/0083 (2013.01); B81C 1/00246 (2013.01); G01N 33/0031 (2013.01); H10N 10/01 (2023.02); H10N 10/80 (2023.02); B81B 2203/0315 (2013.01); B81B 2207/07 (2013.01); B81C 2203/0714 (2013.01); G01N 2201/02 (2013.01)] | 8 Claims |
1. A gas sensor comprising:
a first micro electro-mechanical system (MEMS) die comprising a light source;
a second MEMS die comprising a light detector;
a sample chamber disposes in an optical path between the light source and the light detector; and
a holder substrate;
wherein the first and second MEMS dies are disposed on the holder substrate in a vertical orientation relative to the holder substrate, and with the sample chamber disposed laterally there between;
wherein the sample chamber comprises a waveguide diffusion chamber, and
wherein opposing open ends of the waveguide diffusion chamber function as diffusion apertures.
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