US 11,988,599 B2
Miniature FT-MIR using a MEMS interferometer with a metasurface emitter and detector
Dwight W. Swett, Cypress, TX (US)
Assigned to Saudi Arabian Oil Company, Dhahran (SA)
Filed by Saudi Arabian Oil Company, Dhahran (SA)
Filed on Dec. 14, 2021, as Appl. No. 17/550,267.
Application 17/550,267 is a continuation of application No. 17/453,290, filed on Nov. 2, 2021, granted, now 11,635,369.
Prior Publication US 2023/0139316 A1, May 4, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01J 3/28 (2006.01); G01N 21/35 (2014.01); G01N 21/3577 (2014.01); G01N 33/28 (2006.01)
CPC G01N 21/35 (2013.01) [G01N 21/3577 (2013.01); G01N 33/2823 (2013.01); G01N 2021/3595 (2013.01); G01N 2201/0221 (2013.01); G01N 2201/061 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A mid-infrared (MIR) spectrometer, comprising:
a metasurface IR source to emit radiation when heated, wherein the metasurface IR source comprises an electrically conductive geometric pattern based on a geometric inversion of the Rhodonea conformal mapping contours; and
a metasurface microbolometer to detect the radiation from the metasurface IR source.