US 11,988,576 B2
Leak test device
Jiaping He, Hefei (CN); and Chin-Chung Ku, Hefei (CN)
Assigned to Changxin Memory Technologies, Inc., Hefei (CN)
Appl. No. 17/441,789
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
PCT Filed Jun. 30, 2021, PCT No. PCT/CN2021/103870
§ 371(c)(1), (2) Date Sep. 22, 2021,
PCT Pub. No. WO2022/088735, PCT Pub. Date May 5, 2022.
Claims priority of application No. 202011181217.9 (CN), filed on Oct. 29, 2020.
Prior Publication US 2023/0054970 A1, Feb. 23, 2023
Int. Cl. G01M 3/26 (2006.01); G01M 3/32 (2006.01); B24B 7/22 (2006.01)
CPC G01M 3/26 (2013.01) [B24B 7/22 (2013.01); G01M 3/3272 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A leak test device, the leak test device comprising:
a test platform, the test platform being configured to carry and place a polishing head to be tested for leak, the polishing head being divided into one or more independent partitions, each of the one or more independent partitions having a chamber correspondingly, and each chamber having vents correspondingly;
an upper cover for sealing the chambers, the upper cover being located on a side of the chambers away from the test platform;
a movable device, the movable device being movable on a surface parallel to the test platform, movable in a direction perpendicular to the test platform, and also adapted to apply pressure on the upper cover so that the upper cover seals the chambers; and
a fixed platform for carrying the test platform,
wherein the movable device comprises:
a fixed shaft, a first end of the fixed shaft being fixed on the fixed platform;
a rotating shaft, a first end of the rotating shaft being connected to a second end of the fixed shaft, and the rotating shaft being rotatable around the fixed shaft; and
a pressing device, the pressing device being connected to a second end of the rotating shaft, and after the rotating shaft rotates to a preset position, the pressing device being in contact with the upper cover and applying the pressure on the upper cover.