US 11,988,560 B2
Low thermal capacity micro-bolometer and associated manufacturing method
Nicolas Boudou, Grenoble (FR); and Sébastien Cortial, Sassenage (FR)
Assigned to LYNRED, Palaiseau (FR)
Appl. No. 17/611,830
Filed by LYNRED, Palaiseau (FR)
PCT Filed May 11, 2020, PCT No. PCT/FR2020/050763
§ 371(c)(1), (2) Date Nov. 16, 2021,
PCT Pub. No. WO2021/009421, PCT Pub. Date Jan. 21, 2021.
Claims priority of application No. 1907993 (FR), filed on Jul. 16, 2019.
Prior Publication US 2022/0228917 A1, Jul. 21, 2022
Int. Cl. G01J 5/02 (2022.01); G01J 5/20 (2006.01); G01J 5/22 (2006.01); H04N 5/33 (2023.01)
CPC G01J 5/024 (2013.01) [G01J 5/22 (2013.01); H04N 5/33 (2013.01); G01J 2005/204 (2013.01)] 12 Claims
OG exemplary drawing
 
1. Infrared imaging micro-bolometer integrating a membrane assembled in suspension above a substrate by support arms, the membrane comprising:
an absorbing material configured to capture infrared radiations;
a thermometric material connected to the absorbing material configured to perform a transduction of the infrared radiations captured by said absorbing material; and
at least one central dielectric layer arranged between the absorbing material and the thermometric material;
wherein a surface of the thermometric material is smaller than 0.4 time the surface area of the membrane, and
wherein recesses are formed in the absorbing material and in the at least one central dielectric layer in areas of the membrane devoid of the thermometric material.