US 11,988,537 B2
Powder supply device
Hirotaka Fukanuma, Yoriimachi (JP)
Assigned to Plasma Giken Co., Ltd., Yoriimachi (JP)
Appl. No. 17/622,491
Filed by Plasma Giken Co., Ltd., Yoriimachi (JP)
PCT Filed Jun. 12, 2020, PCT No. PCT/JP2020/023214
§ 371(c)(1), (2) Date Dec. 23, 2021,
PCT Pub. No. WO2020/262042, PCT Pub. Date Dec. 30, 2020.
Claims priority of application No. 2019-117161 (JP), filed on Jun. 25, 2019.
Prior Publication US 2022/0236094 A1, Jul. 28, 2022
Int. Cl. G01F 11/24 (2006.01); B65G 53/46 (2006.01); C23C 4/134 (2016.01)
CPC G01F 11/24 (2013.01) [B65G 53/4633 (2013.01); C23C 4/134 (2016.01)] 11 Claims
OG exemplary drawing
 
1. A powder supply device that continuously supplies a fixed amount of powder, comprising:
a powder accommodation container including a powder delivery hole in aft circular outer shape bottom plate;
a disk installed in a hermetically sealed container that continuously rotates and conveys the powder by a groove facing the powder delivery hole and provided on a circumference;
a gas supply line that blows a carrier gas into the hermetically sealed container; and
a powder carrying-out tube,
wherein the disk is disposed to be slidably rotatable with respect to the circular outer shape bottom plate in a state where a part of a region where the groove is located is covered with the circular outer shape bottom plate of the powder accommodation container, and
wherein the powder carrying-out tube has a tip end portion disposed in an upper portion of the groove, and places the powder that was rotated and conveyed and is located near the tip end portion of the powder carrying-out tube from a pressurized space in the hermetically sealed container on a carrier gas flow to carry out the powder upward.