US 11,988,511 B2
Micromechanical component for a rotation rate sensor and corresponding manufacturing method
Matthias Kuehnel, Boeblingen (DE); Nils Felix Kuhlmann, Ehningen (DE); Robert Maul, Reutlingen (DE); Rolf Scheben, Reutlingen (DE); Steffen Markisch, Reutlingen (DE); Thorsten Balslink, Kirchentellinsfurt (DE); and Wolfram Geiger, Gomaringen (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Appl. No. 17/908,081
Filed by Robert Bosch GmbH, Stuttgart (DE)
PCT Filed Apr. 14, 2021, PCT No. PCT/EP2021/059639
§ 371(c)(1), (2) Date Aug. 30, 2022,
PCT Pub. No. WO2021/219374, PCT Pub. Date Nov. 4, 2021.
Claims priority of application No. 10 2020 205 369.3 (DE), filed on Apr. 28, 2020.
Prior Publication US 2023/0095336 A1, Mar. 30, 2023
Int. Cl. G01C 19/5712 (2012.01); G01C 19/5684 (2012.01); G01C 25/00 (2006.01)
CPC G01C 19/5712 (2013.01) [G01C 19/5684 (2013.01); G01C 25/00 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A micromechanical component for a rotation rate sensor, comprising:
a substrate including a substrate surface;
a one-piece first rotor mass and a one-piece second rotor mass, which are situated mirror symmetrically with respect to a first plane of symmetry aligned perpendicularly to the substrate surface and passing through a center of the first rotor mass and of the second rotor mass in such a way that the first rotor mass may be set in a first rotational vibrating motion about a first rotational axis aligned perpendicularly to the substrate surface, and the second rotor mass may be set in a second rotational vibrating motion phase-shifted by 180° to the first rotational vibrating motion about a second rotational axis aligned in parallel to the first rotational axis; and
four seismic masses, which are situated mirror symmetrically with respect to the first plane of symmetry in such a way that the four seismic masses are each deflectable in parallel to the first plane of symmetry using the first and second rotor masses set in their first and second rotational vibrating motions, respective;
wherein the first rotor mass and a first pair of the four seismic masses connected to the first rotor mass are situated mirror symmetrically to the second rotor mass and a second pair of the four seismic masses connected to the second rotor mass, with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and perpendicularly to the first plane of symmetry.