US 11,988,497 B2
Optical unit and film thickness measurement device
Ikuo Arata, Hamamatsu (JP); Satoshi Takimoto, Hamamatsu (JP); and Kenichi Ohtsuka, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 17/634,298
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Aug. 31, 2020, PCT No. PCT/JP2020/032919
§ 371(c)(1), (2) Date Feb. 10, 2022,
PCT Pub. No. WO2021/106299, PCT Pub. Date Jun. 3, 2021.
Claims priority of application No. 2019-213046 (JP), filed on Nov. 26, 2019.
Prior Publication US 2022/0333913 A1, Oct. 20, 2022
Int. Cl. G01B 11/06 (2006.01); G01B 5/06 (2006.01); G01B 11/02 (2006.01); G02B 17/08 (2006.01)
CPC G01B 11/0625 (2013.01) [G01B 5/06 (2013.01); G01B 11/02 (2013.01); G01B 11/06 (2013.01); G02B 17/0816 (2013.01); G02B 17/0868 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An optical unit comprising:
an input portion comprising an aperture configured to have light having a wavelength extending from an ultraviolet region to a visible region input thereto;
an optical system comprising one or more optical elements configured to condense the light in a state where a chromatic aberration is caused to occur; and
an opening portion comprising an input end toward an optical fiber configured not to image light having a wavelength in the visible region and to image light having a wavelength in the ultraviolet region of the light having the chromatic aberration having occurred therein.