US 11,988,495 B2
Through-focus image-based metrology device, operation method thereof, and computing device for executing the operation
Kwangsoo Kim, Osan-si (KR); Sungyoon Ryu, Seoul (KR); Daejun Park, Hwaseong-si (KR); Seong Yun, Suwon-si (KR); Seungryeol Oh, Daejeon (KR); Sujin Lee, Gwangmyeong-si (KR); Jaeyong Lee, Suwon-si (KR); Minho Rim, Hwaseong-si (KR); Chungsam Jun, Suwon-si (KR); and Myungjun Lee, Seongnam-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Jan. 22, 2021, as Appl. No. 17/156,049.
Claims priority of application No. 10-2020-0074100 (KR), filed on Jun. 18, 2020.
Prior Publication US 2021/0396510 A1, Dec. 23, 2021
Int. Cl. G01B 11/02 (2006.01); G01N 21/88 (2006.01); G03F 7/00 (2006.01)
CPC G01B 11/02 (2013.01) [G01N 21/8806 (2013.01); G01N 21/8851 (2013.01); G03F 7/70625 (2013.01); G03F 7/7065 (2013.01); G01B 2210/56 (2013.01); G01N 2021/8887 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A through-focus image-based metrology device comprising:
an optical device; and
at least one processor configured to:
acquire a plurality of through-focus images of a target from the optical device;
divide a target region in the plurality of through-focus images into a plurality of segments;
extract an intensity from each of the plurality of segments, and generate an intensity profile based on intensities of the plurality of segments; and
perform metrology on the target based on the generated intensity profile,
wherein the optical device comprises:
a stage on which the target is disposed, the stage being configured to move by one step in at least one direction according to control of the at least one processor, and to acquire the plurality of through-focus images;
an image sensor;
an objective lens disposed between the image sensor and the stage, the objective lens being configured to transmit reflected light from the target;
a light source configured to emit illumination light to the target through the objective lens;
a collimator configured to convert the illumination light received from the light source into parallel light;
an illumination angle adjuster configured to adjust an illumination angle of the parallel light output from the collimator to adjust an incident angle of the light on the target; and
a beam splitter configured to reflect a portion of the illumination light passing through the illumination angle adjuster to the target or to transmit the reflected light from the target.