US 11,988,316 B2
Methods and apparatus for heating a liquid
Andrew Michael Yednak, III, Phoenix, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Sep. 14, 2022, as Appl. No. 17/944,296.
Claims priority of provisional application 63/245,461, filed on Sep. 17, 2021.
Prior Publication US 2023/0091275 A1, Mar. 23, 2023
Int. Cl. H01L 21/67 (2006.01); F16L 53/38 (2018.01); C23C 16/455 (2006.01)
CPC F16L 53/38 (2018.01) [H01L 21/67023 (2013.01); C23C 16/45561 (2013.01); Y10T 137/6416 (2015.04)] 19 Claims
OG exemplary drawing
 
1. An apparatus for heating a liquid, comprising:
a valve assembly configured to receive the liquid;
a pipe system downstream from the valve assembly and configured to allow flow of the liquid, wherein the pipe system comprises:
a first pipe sub-system comprising a first pipe connected directly to the valve assembly and having a first diameter; and
a second pipe sub-system downstream from the first pipe, wherein the second pipe sub-system comprises a second pipe having a second diameter that is greater than the first diameter and is a coil shape;
a heating system arranged around the second pipe sub-system; and
a source vessel connected to and downstream from the second pipe sub-system.